Gas Monitoring

Gas Monitoring Systems (GMS)

Gas monitoring systems are important personal safety systems for the semiconductor industry. Most semiconductor manufacturers use many special gases; and these gases will affect the health and safety of personnel. The safety of the gas supply is not only vital to the health and safety of personnel, but also the safety of the entire factory's operation.

Gas monitoring systems utilize real-time monitoring computer and PLCs (programmable logic controllers), connected via Ethernet, to collect data from detectors. This way, the status of each gas supply unit is instantly displayed, in real time, in the central control room. Personnel can then handle any abnormalities immediately, ensuring personal safety and maintaining normal factory operations.